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Fundamentals of microfabrication : the science of miniaturization
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ISBN: 0849308267 9780849308260 Year: 2002 Publisher: Boca Raton, FL : CRC Press [Chemical Rubber Company],

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Abstract

Keywords

Artificial intelligence. Robotics. Simulation. Graphics --- Materials sciences --- Electronics --- Microelectronics --- Integrated circuits --- Microelectromechanical systems --- Machining --- Microelectronic packaging --- Lasers --- Design and construction --- Industrial applications --- -Machining --- -Microelectronic packaging --- 621.38 --- IC integrated circuits --- MEMS Micro Electro Mechanical Systems --- NEMS Nano Electro Mechanical Systems --- construeren --- elektromechanica --- etsen --- lithografie --- micro-elektronica --- microstructuren --- miniaturisatie --- nanochemie --- nanotechnologie --- ontwerpen --- biomimetica --- liga --- mems-technologie --- microfabricagetechniek --- micromachine --- nanotechniek --- nems (nano electromechanical system) --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Packaging (Microelectronics) --- Electronic packaging --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Mechatronics --- Materials --- Machine-shop practice --- Manufacturing processes --- Cutting --- Machine-tools --- Light amplification by stimulated emission of radiation --- Masers, Optical --- Optical masers --- Light amplifiers --- Light sources --- Optoelectronic devices --- Nonlinear optics --- Optical parametric oscillators --- Design and construction. --- Elektronische inrichtingen. Elektronische buizen.Fotocellen.Deeltjesversnellers.Röntgenbuizen --- Integrated circuits - Design and construction --- Microelectromechanical systems - Design and construction --- Lasers - Industrial applications --- Integrated circuits-design and construction --- Lasers-industrial applications --- Microelectromechanical systems-design construction

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