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Numerical analysis --- Computer science --- Sequential machine theory --- Formal languages --- Théorie des machines séquentielles --- Langages formels --- Congresses --- Congrès --- Sequential Machine Theory --- FORMAL LANGUAGES --- Théorie des machines séquentielles --- Congrès --- Computer science. --- Logic design. --- Computation by Abstract Devices. --- Logics and Meanings of Programs. --- Design, Logic --- Design of logic systems --- Digital electronics --- Electronic circuit design --- Logic circuits --- Machine theory --- Switching theory --- Informatics --- Science --- Logique --- Sequential Machine Theory - Congresses --- FORMAL LANGUAGES - Congresses

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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines. .

Engineering. --- Electronics and Microelectronics, Instrumentation. --- Circuits and Systems. --- Mechanics. --- Surfaces and Interfaces, Thin Films. --- Continuum Mechanics and Mechanics of Materials. --- Materials. --- Electronics. --- Systems engineering. --- Surfaces (Physics). --- Ingénierie --- Mécanique --- Matériaux --- Electronique --- Ingénierie des systèmes --- Surfaces (Physique) --- Microelectromechanical systems. --- Electronic apparatus and appliances. --- Transducers. --- Electronic books. -- local. --- Microelectromechanical systems --- Electronic apparatus and appliances --- Transducers --- Electrical & Computer Engineering --- Engineering & Applied Sciences --- Electrical Engineering --- Electronic devices --- Electronics --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Apparatus and appliances --- 681.3*A0 --- 681.3*D31 --- 681.3*F12 --- Formal definitions and theory: semantics syntax (Programming languages)--See also {681.3*D21} {681.3*F31} {681.3*F32} {681.3*F42} {681.3*F43} --- Process management: concurrency deadlocks multiprocessing/multiprogrammingmutual exclusion scheduling synchronization (Operating systems) --- Modes of computation: alternation and nondeterminism parallelism probabilistic computation relations among modes relativized computation --- 681.3*F12 Modes of computation: alternation and nondeterminism parallelism probabilistic computation relations among modes relativized computation --- 681.3*D41 Process management: concurrency deadlocks multiprocessing/multiprogrammingmutual exclusion scheduling synchronization (Operating systems) --- 681.3*D31 Formal definitions and theory: semantics syntax (Programming languages)--See also {681.3*D21} {681.3*F31} {681.3*F32} {681.3*F42} {681.3*F43} --- Sequential Machine Theory --- FORMAL LANGUAGES --- Continuum mechanics. --- Microelectronics. --- Electronic circuits. --- Materials --- Thin films. --- Surfaces. --- Programming --- Computer science --- #TCPW P4.0 --- #TCPW P4.6 --- 681.3*D41 --- 681.3*F3 --- 681.3*F3 Logics and meanings of programs (Theory of computation) --- Logics and meanings of programs (Theory of computation) --- 681.3*F12 Modes of computation: alternation and nondeterminism; parallelism; probabilistic computation; relations among modes; relativized computation --- Modes of computation: alternation and nondeterminism; parallelism; probabilistic computation; relations among modes; relativized computation --- 681.3*D41 Process management: concurrency; deadlocks; multiprocessing/multiprogramming;mutual exclusion; scheduling; synchronization (Operating systems) --- Process management: concurrency; deadlocks; multiprocessing/multiprogramming;mutual exclusion; scheduling; synchronization (Operating systems) --- 681.3*A0 General --- General --- 681.3*D31 Formal definitions and theory: semantics; syntax (Programming languages)--See also {681.3*D21}; {681.3*F31}; {681.3*F32}; {681.3*F42}; {681.3*F43} --- Formal definitions and theory: semantics; syntax (Programming languages)--See also {681.3*D21}; {681.3*F31}; {681.3*F32}; {681.3*F42}; {681.3*F43} --- 681.3*F0 --- 681.3*F4 --- 681.3*F4 Mathematical logic and formal languages (Theory of computation) --- Mathematical logic and formal languages (Theory of computation) --- Computerwetenschap--?*F0 --- Electric apparatus and appliances --- Electromechanical devices --- Physical instruments --- Scientific apparatus and instruments --- Electronic instruments --- Microtechnology --- Mechatronics --- Parallel processing (Electronic computers) --- Programming languages (Electronic computers) --- Congresses --- Semantics --- Parallélisme (Informatique) --- Langages de programmation --- Congrès --- Sémantique --- Mechanics, Applied. --- Classical Mechanics. --- Solid Mechanics. --- Applied mechanics --- Engineering, Mechanical --- Engineering mathematics --- Physics --- Surface chemistry --- Surfaces (Technology) --- Classical mechanics --- Newtonian mechanics --- Dynamics --- Quantum theory --- Engineering systems --- System engineering --- Engineering --- Industrial engineering --- System analysis --- Electrical engineering --- Physical sciences --- Design and construction --- Materials—Surfaces. --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Coatings --- Thick films --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Semiconductors --- Miniature electronic equipment --- Electron-tube circuits --- Electric circuits --- Electron tubes --- Logic design. --- Software engineering. --- Logics and Meanings of Programs. --- Software Engineering. --- Information theory. --- Theory of Computation. --- Software Engineering/Programming and Operating Systems. --- Computer software engineering --- Design, Logic --- Design of logic systems --- Digital electronics --- Electronic circuit design --- Logic circuits --- Machine theory --- Switching theory --- Communication theory --- Communication --- Cybernetics --- Logique --- Programmation système (informatique) --- Parallel processing (Electronic computers) - Congresses --- Programming languages (Electronic computers) - Semantics - Congresses --- Sequential Machine Theory - Congresses --- FORMAL LANGUAGES - Congresses --- Programming languages (Electronic computers) - Congresses --- Langages de programmation.