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Plasma etching. --- Semiconductors --- Thin films --- Etching. --- Surfaces.
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Couches minces. --- Matière --- Matter --- Matter --- Molecules. --- Molecules. --- Molécules. --- Thin films. --- Thin films. --- Propriétés. --- Properties. --- Properties.
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Colloids --- Colloids --- Soap bubbles --- Soap --- Thin films --- Thin films --- Electric properties. --- Electric properties. --- Electric properties. --- Electric properties. --- Electric properties. --- Electric properties.
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Plasma-enhanced chemical vapor deposition --- Silane --- Solar cells --- Thin films --- Materials
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This work is an investigation of preliminary steps in the microfabrication of titanium nitride microheaters to be integrated under the surface of flight mirrors. This work focuses on the analysis of titanium thin films properties as a function of thickness.
Microheaters --- Titanium nitride --- TiN --- Sputtering --- Ion Beam Sputtering --- IBS --- Laser-Induced Forward Transfer --- LIFT Thin films --- Ingénierie, informatique & technologie > Ingénierie aérospatiale
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Proefschriften --- Thèses --- Academic collection --- 621.3.049.77 --- #BIBC:T1995 --- 539.216 --- Microelectronics. Integrated circuits --- Cellular structure. Fibrous structure. Laminar structure. Films. Thin films. Radiating structures --- Theses --- 539.216 Cellular structure. Fibrous structure. Laminar structure. Films. Thin films. Radiating structures --- 621.3.049.77 Microelectronics. Integrated circuits
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