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This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

Microelectromechanical systems. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Electronics engineering

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This reprint contains the articles accepted for publication in the Special Issue of Micromachines (MDPI) on 'Micro/Nanophotonic Devices in Europe'. It aims at presenting an overview, limited but still representative, of the research in the field of photonics being carried out by European groups (often in collaboration with colleagues abroad). The reprint includes, among others, a review paper on photonic devices fabricated by Germanium implantation and two review articles illustrating the fundamentals of non-linear photonic phenomena and devices, and their main applications.

Nanophotonics. --- Microelectromechanical systems. --- Research --- Science --- Science research --- Scientific research --- Information services --- Learning and scholarship --- Methodology --- Research teams --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Nano photonics --- Photonics