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In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments.

Semiconductors --- Effect of radiation on. --- -Crystalline semiconductors --- Semi-conductors --- Semiconducting materials --- Semiconductor devices --- Crystals --- Electrical engineering --- Electronics --- Solid state electronics --- Effect of radiation on --- Materials --- -Effect of radiation on --- Semiconductors, Effect of radiation on --- Crystallography. --- Energy policy. --- Energy and state. --- Optics. --- Electrodynamics. --- Materials science. --- Optical materials. --- Electronic materials. --- Materials—Surfaces. --- Thin films. --- Crystallography and Scattering Methods. --- Energy Policy, Economics and Management. --- Classical Electrodynamics. --- Characterization and Evaluation of Materials. --- Optical and Electronic Materials. --- Surfaces and Interfaces, Thin Films. --- Films, Thin --- Solid film --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Electronic materials --- Optics --- Material science --- Physical sciences --- Dynamics --- Physics --- Light --- Energy and state --- Power resources --- State and energy --- Industrial policy --- Energy conservation --- Leptology --- Mineralogy --- Government policy