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micro-elektronica --- Engineering sciences. Technology --- microelectronics --- tijdschriften --- actuatoren --- afgesloten tijdschriften --- elektromechanica --- elektronica --- mechanica --- microsystemen --- sensoren --- Periodicals --- Applied Physics --- Electronics --- Engineering. --- Mechanical Engineering --- Optics & Opto Electronics. --- Physics. --- Engineering --- Physics --- Electrical Engineering --- Optics & Opto Electronics --- Microelectromechanical systems --- Micromachines --- Dispositifs électromécaniques --- Electromechanical devices --- Microtechnology --- Mechatronics --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromechanical devices --- Micromechanical systems --- Périodiques.

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Artificial intelligence. Robotics. Simulation. Graphics --- Materials sciences --- Electronics --- Microelectronics --- Integrated circuits --- Microelectromechanical systems --- Machining --- Microelectronic packaging --- Lasers --- Design and construction --- Industrial applications --- -Machining --- -Microelectronic packaging --- 621.38 --- IC integrated circuits --- MEMS Micro Electro Mechanical Systems --- NEMS Nano Electro Mechanical Systems --- construeren --- elektromechanica --- etsen --- lithografie --- micro-elektronica --- microstructuren --- miniaturisatie --- nanochemie --- nanotechnologie --- ontwerpen --- biomimetica --- liga --- mems-technologie --- microfabricagetechniek --- micromachine --- nanotechniek --- nems (nano electromechanical system) --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Packaging (Microelectronics) --- Electronic packaging --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Mechatronics --- Materials --- Machine-shop practice --- Manufacturing processes --- Cutting --- Machine-tools --- Light amplification by stimulated emission of radiation --- Masers, Optical --- Optical masers --- Light amplifiers --- Light sources --- Optoelectronic devices --- Nonlinear optics --- Optical parametric oscillators --- Design and construction. --- Elektronische inrichtingen. Elektronische buizen.Fotocellen.Deeltjesversnellers.Röntgenbuizen --- Integrated circuits - Design and construction --- Microelectromechanical systems - Design and construction --- Lasers - Industrial applications --- Integrated circuits-design and construction --- Lasers-industrial applications --- Microelectromechanical systems-design construction

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material. MEMS Vibratory Gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Readers will find: A unique balance between theory and practical design issues. Comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sensor design. Solid background Information on mechanical and electrical design, fabrication, packaging, testing and characterization. About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus.

Cobordism theory. --- Differentiable mappings. --- Topological transformation groups. --- Mechanical Engineering - General --- Mechanical Engineering --- Engineering & Applied Sciences --- Gyroscopes. --- Microelectromechanical systems. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Gyros (Gyroscopes) --- Gyroscope --- Engineering. --- Mechanical engineering. --- Automotive engineering. --- Electronics. --- Microelectronics. --- Electronic circuits. --- Electronics and Microelectronics, Instrumentation. --- Circuits and Systems. --- Automotive Engineering. --- Mechanical Engineering. --- 51 --- 51 Mathematics --- Mathematics --- Mathematical analysis --- Electromechanical devices --- Microtechnology --- Mechatronics --- Rotational motion (Rigid dynamics) --- Tops --- Systems engineering. --- Engineering, Mechanical --- Engineering --- Machinery --- Steam engineering --- Construction --- Industrial arts --- Technology --- Engineering systems --- System engineering --- Industrial engineering --- System analysis --- Electrical engineering --- Physical sciences --- Design and construction --- Algebraic topology --- Topologie algébrique --- Transformation groups --- Transformations, Groupes de --- Electron-tube circuits --- Electric circuits --- Electron tubes --- Electronics --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Semiconductors --- Miniature electronic equipment --- Lie, Groupes de --- Géometrie différentielle --- Algebraic topology. --- Transformation groups. --- Géometrie différentielle --- Topologie algébrique --- Variétés topologiques --- Topologie differentielle --- Analyse harmonique