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Plasma etching. --- Semiconductors --- Thin films --- Etching. --- Surfaces.
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Carbon. --- Deposition. --- Diamonds. --- Protective coatings. --- Sputtering. --- Thin films.
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Ion bombardment --- Semiconductor films --- Sputtering (Physics) --- Thin films, Multilayered
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Carbon. --- Energy gap (Physics) --- Thin films. --- Scattering (Physics)
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Thin films --- Couches minces --- Mechanical properties --- Propriétés mécaniques --- Propriétés mécaniques
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EPITAXY --- MAGNETIC FILMS --- SUPERLATTICES AS MATERIALS --- THIN FILMS, MULTILAYERED --- MAGNETIC PROPERTIES
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Amorphous materials. --- Carbon. --- Energy gaps (solid state) --- Thin films. --- Wave dispersion. --- Energy gap (Physics) --- Scattering (Physics)
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