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This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

Microelectromechanical systems. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Electronics engineering

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Microelectromechanical systems --- Transducers --- Accelerometers --- Gyroscopes --- Electric apparatus and appliances --- Electromechanical devices --- Electronic apparatus and appliances --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Microtechnology --- Mechatronics --- Gyros (Gyroscopes) --- Gyroscope --- Rotational motion (Rigid dynamics) --- Tops --- Aeronautical instruments --- Speed-indicators

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This book constitutes the thoroughly refereed post-conference proceedings of the 15th International Meeting on DNA Computing, DNA15, held in Fayetteville, AR, USA, in June 2009. The 16 revised full papers presented were carefully selected during two rounds of reviewing and improvement from 38 submissions. The papers feature current interdisciplinary research in molecular-scale manipulation of matter - in particular, implementation of nanoscale computation and programmed assembly of materials are of interest, thus reflecting a broader scope beyond DNA-based nanotechnology and computation.

Molecular computers --- Engineering & Applied Sciences --- Computer Science --- Biocomputers --- Biochemical computers --- Bioelectronic computers --- Biomechanical computers --- Computer science. --- Computers. --- Algorithms. --- Bioinformatics. --- Biochemistry. --- Nanotechnology. --- Computer Science. --- Theory of Computation. --- Biochemistry, general. --- Nanotechnology and Microengineering. --- Computation by Abstract Devices. --- Algorithm Analysis and Problem Complexity. --- Computational Biology/Bioinformatics. --- Molecular technology --- Nanoscale technology --- High technology --- Biological chemistry --- Chemical composition of organisms --- Organisms --- Physiological chemistry --- Biology --- Chemistry --- Medical sciences --- Bio-informatics --- Biological informatics --- Information science --- Computational biology --- Systems biology --- Algorism --- Algebra --- Arithmetic --- Automatic computers --- Automatic data processors --- Computer hardware --- Computing machines (Computers) --- Electronic brains --- Electronic calculating-machines --- Electronic computers --- Hardware, Computer --- Computer systems --- Cybernetics --- Machine theory --- Calculators --- Cyberspace --- Informatics --- Science --- Composition --- Data processing --- Foundations --- Computers --- Conscious automata --- Information theory. --- Engineering. --- Computer software. --- Communication theory --- Communication --- Software, Computer --- Construction --- Industrial arts --- Technology --- Microtechnology. --- Microelectromechanical systems. --- Microsystems and MEMS. --- Computational and Systems Biology. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Micro-technology --- Microtechnologies

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In part one, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In part two, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material. MEMS Vibratory Gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Readers will find: A unique balance between theory and practical design issues. Comprehensive and detailed information outlining the mathematical models of the mechanical structure and system-level sensor design. Solid background Information on mechanical and electrical design, fabrication, packaging, testing and characterization. About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus.

Cobordism theory. --- Differentiable mappings. --- Topological transformation groups. --- Mechanical Engineering - General --- Mechanical Engineering --- Engineering & Applied Sciences --- Gyroscopes. --- Microelectromechanical systems. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Gyros (Gyroscopes) --- Gyroscope --- Engineering. --- Mechanical engineering. --- Automotive engineering. --- Electronics. --- Microelectronics. --- Electronic circuits. --- Electronics and Microelectronics, Instrumentation. --- Circuits and Systems. --- Automotive Engineering. --- Mechanical Engineering. --- 51 --- 51 Mathematics --- Mathematics --- Mathematical analysis --- Electromechanical devices --- Microtechnology --- Mechatronics --- Rotational motion (Rigid dynamics) --- Tops --- Systems engineering. --- Engineering, Mechanical --- Engineering --- Machinery --- Steam engineering --- Construction --- Industrial arts --- Technology --- Engineering systems --- System engineering --- Industrial engineering --- System analysis --- Electrical engineering --- Physical sciences --- Design and construction --- Algebraic topology --- Topologie algébrique --- Transformation groups --- Transformations, Groupes de --- Electron-tube circuits --- Electric circuits --- Electron tubes --- Electronics --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Semiconductors --- Miniature electronic equipment --- Lie, Groupes de --- Géometrie différentielle --- Algebraic topology. --- Transformation groups. --- Géometrie différentielle --- Topologie algébrique --- Variétés topologiques --- Topologie differentielle --- Analyse harmonique