TY - BOOK ID - 135799090 TI - The Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997 AU - IEEE Workshop on Micro Electro Mechanical Systems AU - The American Society of Mechanical Engineers AU - American Society of Mechanical Engineers Dynamic Systems and Control Division AU - IEEE Robotics and Automation Society PY - 1997 PB - [Place of publication not identified] Institute of Electrical and Electronics Engineers DB - UniCat KW - Microelectronics KW - Microelectromechanical systems KW - Detectors KW - Actuators UR - https://www.unicat.be/uniCat?func=search&query=sysid:135799090 AB - ER -