TY - BOOK ID - 19462808 TI - Sputtering materials for VLSI and thin film devices PY - 2014 SN - 0815515936 1306119952 012810080X 0815519877 9780080947716 0080947719 9780815519874 9781306119955 9780815515937 PB - Oxford ; Boston : William Andrew Publishing, DB - UniCat KW - Flat panel displays KW - Cathode sputtering KW - Microelectronics KW - Sputtering (Physics) KW - Materials. KW - Collisions (Nuclear physics) KW - Surfaces (Technology) KW - Information display systems KW - Microminiature electronic equipment KW - Microminiaturization (Electronics) KW - Electronics KW - Microtechnology KW - Semiconductors KW - Miniature electronic equipment UR - https://www.unicat.be/uniCat?func=search&query=sysid:19462808 AB - An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat pan ER -