TY - BOOK ID - 5210071 TI - Polycrystalline silicon for integrated circuit applications. PY - 1988 VL - SECS 45 SN - 0898382599 9780898382594 PB - Boston Kluwer DB - UniCat KW - Integrated circuits KW - Silicon KW - Circuits intégrés KW - Silicium KW - Materials. KW - Electric properties. KW - Matériaux KW - Propriétés électriques KW - -Silicium KW - Group 14 elements KW - Nonmetals KW - Chips (Electronics) KW - Circuits, Integrated KW - Computer chips KW - Microchips KW - Electronic circuits KW - Microelectronics KW - Electric properties KW - -Materials. KW - Materials KW - Integrated circuits - Materials KW - Silicon - Electric properties UR - https://www.unicat.be/uniCat?func=search&query=sysid:5210071 AB - ER -