TY - BOOK ID - 7538599 TI - Micro electronic and mechanical systems PY - 2009 SN - 9535158473 9533070277 PB - IntechOpen DB - UniCat KW - Microelectromechanical systems. KW - MEMS (Microelectromechanical systems) KW - Micro-electro-mechanical systems KW - Micro-machinery KW - Microelectromechanical devices KW - Micromachinery KW - Micromachines KW - Micromechanical devices KW - Micromechanical systems KW - Electromechanical devices KW - Microtechnology KW - Mechatronics KW - Electronics engineering UR - https://www.unicat.be/uniCat?func=search&query=sysid:7538599 AB - This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. ER -