TY - BOOK ID - 8056785 TI - Quantitative Data Processing in Scanning Probe Microscopy PY - 2012 SN - 1283860465 1455730599 1455730580 0128133481 9781455730599 9781455730582 9780128133484 0128133473 9780128133477 PB - Burlington Elsevier Science DB - UniCat KW - Scanning probe microscopy. KW - Scanned probe microscopy KW - Scanning electron microscopy UR - https://www.unicat.be/uniCat?func=search&query=sysid:8056785 AB - Accurate measurement at the nano-scale - nanometrology - is a critical tool for advanced nanotechnology applications, where exact quantities and engineering precision are beyond the capabilities of traditional measuring techniques and instruments. Scanning Probe Microscopy (SPM) builds up a picture of a specimen by scanning with a physical probe; unrestrained by the wavelength of light or electrons, the resolution obtainable with this technique can resolve atoms. SPM instruments include the Atomic Force Microscope (AFM) and Scanning Tunneling Microscope (STM). Despite tremendous adv ER -