TY - THES ID - 128380562 TI - Characterization of the mechanical stress induced during silicidation in Sub-0.25 microM MOS technologies AU - Steegen, An AU - IMEC. AU - KUL. Faculteit Toegepaste wetenschappen. PY - 2001 SN - 9056822810 PB - Leuven : KUL, DB - UniCat UR - https://www.unicat.be/uniCat?func=search&query=sysid:128380562 AB - ER -