TY - BOOK ID - 76083237 TI - Laser processing of thin films and microstructures : oxidation, deposition and etching of insulators. PY - 1987 SN - 3540179518 PB - Berlin Springer DB - UniCat KW - Materials sciences UR - https://www.unicat.be/uniCat?func=search&query=sysid:76083237 AB - ER -