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Tables of ion implantation spatial distributions
Authors: --- --- ---
ISBN: 2881240712 Year: 1986 Publisher: New York (N.Y.) Gordon and Breach

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Keywords

Ion implantation --- Tables


Book
EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR
Authors: --- --- --- --- --- et al.
ISBN: 3112575660 Year: 2022 Publisher: Berlin ; Boston : De Gruyter,

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Keywords

Semiconductors --- Surfaces

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